Cover Image

Silicon micromachining /

Bibliographic Details
Main Author: Elwenspoek, M. (Miko), 1948-
Other Authors: Jansen, H. V. (Henri V.)
Format: Book
Language:English
Published: Cambridge, [England] ; New York : Cambridge University Press, 1998.
Series:Cambridge studies in semiconductor physics and microelectronic engineering ; 7.
Subjects:
Silicon.
Micromachining.
Etching.
Description
Physical Description:xiii, 405 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:052159054X (hb)