Silicon micromachining /

Bibliographic Details

Main Author:	Elwenspoek, M. (Miko), 1948-
Other Authors:	Jansen, H. V. (Henri V.)
Format:	Book
Language:	English
Published:	Cambridge, [England] ; New York : Cambridge University Press, 1998.
Series:	Cambridge studies in semiconductor physics and microelectronic engineering ; 7.
Subjects:	Silicon. Micromachining. Etching.