APA (7th ed.) Citation

Elwenspoek, M., & Jansen, H. V. (1998). Silicon micromachining. Cambridge University Press.

Chicago Style (17th ed.) Citation

Elwenspoek, M., and H. V. Jansen. Silicon Micromachining. Cambridge, [England] ; New York: Cambridge University Press, 1998.

MLA (9th ed.) Citation

Elwenspoek, M., and H. V. Jansen. Silicon Micromachining. Cambridge University Press, 1998.