APA (7th ed.) Citation

European Optical Society, Society of Photo-optical Instrumentation Engineers, European Commission. Directorate-General XII, Science, Research, and Development, Scottish Enterprise, Sira Technology Centre (U.K.), Institution of Electrical Engineers, . . . Narasimhan, M. K. (1999). Process and equipment control in microelectronic manufacturing: 19-20 May 1999, Edinburgh, Scotland. SPIE.

Chicago Style (17th ed.) Citation

European Optical Society, Society of Photo-optical Instrumentation Engineers, Science European Commission. Directorate-General XII, Scottish Enterprise, Sira Technology Centre (U.K.), Institution of Electrical Engineers, Kevin Yallup, and Murali K. Narasimhan. Process and Equipment Control in Microelectronic Manufacturing: 19-20 May 1999, Edinburgh, Scotland. Bellingham, Wash., USA: SPIE, 1999.

MLA (9th ed.) Citation

European Optical Society, et al. Process and Equipment Control in Microelectronic Manufacturing: 19-20 May 1999, Edinburgh, Scotland. SPIE, 1999.