Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland /

Bibliographic Details
Corporate Authors:	European Optical Society, Society of Photo-optical Instrumentation Engineers, European Commission. Directorate-General XII, Science, Research, and Development, Scottish Enterprise, Sira Technology Centre (U.K.), Institution of Electrical Engineers
Other Authors:	Yallup, Kevin, Narasimhan, Murali K.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Europto series. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3742.
Subjects:	Microelectronics > Materials > Congresses. Integrated circuits > Very large scale integration > Congresses.

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