Cover Image

Microelectromechanical structures for materials research : symposium held April 15-16, 1998, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Brown, Stuart B.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1998]
Series:Materials Research Society symposia proceedings ; v. 518.
Subjects:
Materials > Research > Equipment and supplies > Congresses.
Microelectromechanical systems > Congresses.
Description
Physical Description:xi, 248 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1558994246