Microelectromechanical structures for materials research : symposium held April 15-16, 1998, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors:	Brown, Stuart B.
Format:	Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [1998]
Series:	Materials Research Society symposia proceedings ; v. 518.
Subjects:	Materials > Research > Equipment and supplies > Congresses. Microelectromechanical systems > Congresses.

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