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15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany /

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich-Unterhaching, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, Semiconductor Equipment and Materials International, Europe, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3665.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
X-ray lithography > Congresses.

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Call Number: TK7872.M3 E97 1998
 
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TK7872.M3 E97 1998 Available