Motion control of a wafer stage : a design approach for speeding up IC production /

Bibliographic Details
Main Author:	Roover, Dick de
Format:	Thesis Book
Language:	English
Language Notes:	Summary also in Dutch; preface in Dutch.
Published:	Delft, Netherlands : Delft University Press, [1997]
Subjects:	Programmable controllers > Design and construction. Integrated circuits > Wafer-scale integration > Design and construction. Very high speed integrated circuits > Design and construction.

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