Microstructural and electrical properties of resolidified submicron Al lines /

Bibliographic Details
Main Author:	Homberg, Marc Jan Christiaan van den, 1970-
Format:	Thesis Book
Language:	English
Language Notes:	Summary also in Dutch.
Published:	Delft : Delft University Press, [1998]
Subjects:	Aluminum films. Microstructure. Electrodiffusion. Integrated circuits > Design and construction.

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