Semiconductor wafer bonding : science and technology /

Bibliographic Details
Main Author:	Tong, Q.-Y
Corporate Author:	Electrochemical Society
Other Authors:	Gösele, U.
Format:	Book
Language:	English
Published:	New York : John Wiley, [1999]
Series:	Electrochemical Society series.
Subjects:	Semiconductors > Bonding. Semiconductor wafers.

Remote Storage