Methodology for the modeling and simulation of microsystems /

Bibliographic Details
Main Author:	Romanowicz, Bartlomiej F., 1967-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, 1998.
Series:	Microsystems (Series) (unnumbered)
Subjects:	Microelectromechanical systems > Computer simulation. Computer-aided design.

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