Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A. /
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Pennsylvania :
Materials Research Society,
[1998]
|
| Series: | Materials Research Society symposia proceedings ;
v. 525. |
| Subjects: |
| Physical Description: | xiii, 403 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558994319 |