Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Author:	Materials Research Society
Other Authors:	Öztürk, Mehmet C.
Format:	Book
Language:	English
Published:	Warrendale, Pennsylvania : Materials Research Society, [1998]
Series:	Materials Research Society symposia proceedings ; v. 525.
Subjects:	Semiconductors > Heat treatment > Congresses. Semiconductor doping > Congresses. Vapor-plating > Congresses. Rapid thermal processing > Congresses.

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