Laser-assisted microtechnology /

Bibliographic Details
Main Author:	Metev, S. M. (Simeon Metodiev)
Other Authors:	Veĭko, V. P. (Vadim Pavlovich)
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [1998]
Edition:	2nd, updated ed.
Series:	Springer series in materials science ; v. 19.
Subjects:	Electronic industries > Technological innovations. Lasers > Industrial applications. Manufacturing processes. Micromachining. Thin film devices > Design and construction.

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