Micromachined devices and components IV : 21-22 September 1998, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	French, Patrick J., Chau, Kevin
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1998]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3514.
Subjects:	Electromechanical devices > Congresses. Micromechanics > Congresses. Micromachining > Congresses.

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