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Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September 1998, Santa Clara, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Prasad, Sharad, Hartmann, Hans-Dieter, Tsujide, Tohru
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3510.
Subjects:
Microelectronics > Congresses.
Integrated circuits > Very large scale integration > Congresses.
Description
Physical Description:vii, 240 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819429694