Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September 1998, Santa Clara, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Prasad, Sharad, Hartmann, Hans-Dieter, Tsujide, Tohru
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1998]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3510.
Subjects:	Microelectronics > Congresses. Integrated circuits > Very large scale integration > Congresses.

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