APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Solid State Technology, Ajuria, S., & Hossain, T. Z. (1998). In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II: 23-24 September 1998, Santa Clara, California. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Solid State Technology, Sergio Ajuria, and Tim Z. Hossain. In-line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II: 23-24 September 1998, Santa Clara, California. Bellingham, Washington: SPIE, 1998.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. In-line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II: 23-24 September 1998, Santa Clara, California. SPIE, 1998.