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In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II : 23-24 September 1998, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Solid State Technology
Other Authors: Ajuria, Sergio, Hossain, Tim Z.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3509.
Subjects:
Integrated circuits > Design and construction > Congresses.
Semiconductors > Design and construction > Congresses.
Optical pattern recognition > Congresses.
Manufacturing processes > Congresses.

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Holdings details from Remote Storage
Call Number: TK7871.85 .I485 1998
 
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TK7871.85 .I485 1998 Available