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Supercritical fluid cleaning : fundamentals, technology and applications /

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Bibliographic Details
Other Authors: McHardy, John, Sawan, Samuel P.
Format: Book
Language:English
Published: Westwood, N.J. : Noyes Publications, [1998]
Series:Materials science, process technology and semiconductors.
Subjects:
Supercritical fluids.
Cleaning.
Description
Item Description:Series title from jacket.
Physical Description:xvi, 290 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0815514166