Supercritical fluid cleaning : fundamentals, technology and applications /

Bibliographic Details

Other Authors:	McHardy, John, Sawan, Samuel P.
Format:	Book
Language:	English
Published:	Westwood, N.J. : Noyes Publications, [1998]
Series:	Materials science, process technology and semiconductors.
Subjects:	Supercritical fluids. Cleaning.