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Micro- and nanopatterning polymers /

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Bibliographic Details
Corporate Authors: American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors: Ito, Hiroshi, 1946-
Format: Book
Language:English
Published: Washington, D.C. : American Chemical Society, [1998]
Series:ACS symposium series. 706.
Subjects:
Microelectronics > Materials.
Polymeric composites.
Photoresists > Materials.

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Call Number: TK7871.15.P6 M517 1998
 
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TK7871.15.P6 M517 1998 Available