Silicon front-end technology--materials processing and modelling : symposium held April 13-15, 1998 in San Francisco, California, U.S.A. /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[1998]
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| Series: | Materials Research Society symposia proceedings ;
v. 532. |
| Subjects: |
| Physical Description: | xi, 228 pages : illustrations (some color) ; 24 cm. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558994386 |