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Silicon front-end technology--materials processing and modelling : symposium held April 13-15, 1998 in San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Cowern, Nicholas E. B.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1998]
Series:Materials Research Society symposia proceedings ; v. 532.
Subjects:
Semiconductors > Design and construction.
Semiconductor doping.
Semiconductors > Defects.

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Call Number: TK7871.85 .S5464 1998
 
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TK7871.85 .S5464 1998 Available