Cover Image

Electron microscopy of semiconducting materials and ULSI devices : symposium held April 15-16, 198, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors: Hayzelden, Clive, Hetherington, Crispin, Ross, Frances
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1998]
Series:Materials Research Society symposia proceedings ; v. 523.
Subjects:
Integrated circuits > Ultra large scale integration > Testing > Congresses.
Semiconductors > Testing > Congresses.
Electron microscopy > Congresses.
Description
Physical Description:xi, 270 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994297