Electron microscopy of semiconducting materials and ULSI devices : symposium held April 15-16, 198, San Francisco, California, U.S.A. /

Bibliographic Details
Other Authors:	Hayzelden, Clive, Hetherington, Crispin, Ross, Frances
Format:	Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [1998]
Series:	Materials Research Society symposia proceedings ; v. 523.
Subjects:	Integrated circuits > Ultra large scale integration > Testing > Congresses. Semiconductors > Testing > Congresses. Electron microscopy > Congresses.

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