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Microlithography fundamentals in semiconductor devices and fabrication technology /

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Bibliographic Details
Main Author: Nonogaki, Saburo, 1930-
Other Authors: Ueno, Takumi, 1951-, Ito, Toshio, 1952-
Format: Book
Language:English
Published: New York : Marcel Dekker, [1998]
Subjects:
Semiconductors > Design and construction.
Microlithography > Industrial applications.
Manufacturing processes.
Photoresists.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TK7871.85 .N66 1998
 
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TK7871.85 .N66 1998 Available