Piezo-driven stages for nanopositioning with extreme stability : theoretical aspects and practical design considerations /

Bibliographic Details

Main Author:	Wulp, Hendrik van der
Format:	Thesis Book
Language:	English
Language Notes:	Summary also in Dutch.
Published:	Delft, Netherlands : Delft University Press, [1997]
Subjects:	Nanotechnology. Miniature electronic equipment. Piezoelectric devices.