Stress-induced phenomena in metallization : Fourth International Workshop, Tokyo, Japan, June 1997 /

Bibliographic Details
Other Authors:	Okabayashi, Hidekazu, Shingubara, Shoso, Ho, P. S.
Format:	Book
Language:	English
Published:	Woodbury, N.Y. : AIP Press, [1998]
Series:	AIP conference proceedings ; 418.
Subjects:	Semiconductors > Defects > Congresses. Metallic films > Congresses. Thin film devices > Defects > Congresses. Aluminum films > Congresses.

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