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Semiconductor micromachining /

Bibliographic Details
Other Authors: Campbell, S. A., Lewerenz, H.- J.
Format: Book
Language:English
Published: Chichester, England ; New York : Wiley, -[1998]
Subjects:
Semiconductors > Design and construction.
Micromachining.
Microfabrication.

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Holdings details from Remote Storage
Call Number: TK7871.85 .S4295 1998
Library Owns: TK7871.85 .S4295 1998 (v.1-v.2)
Call Number Status Get It
TK7871.85 .S4295 1998 v.1 Available
TK7871.85 .S4295 1998 v.2 Available