Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Dubowski, J. J., Dyer, Peter E.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1998]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3274.
Subjects:	Microelectronics > Congresses. Lasers > Industrial applications > Congresses. Manufacturing processes > Congresses. Optoelectronic devices > Design and construction > Congresses.

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