Chemical mechanical planarization of microelectronic materials /

Bibliographic Details
Main Author:	Steigerwald, Joseph M.
Other Authors:	Murarka, S. P., Gutmann, Ronald J.
Format:	Book
Language:	English
Published:	New York : J. Wiley, [1997]
Subjects:	Microelectronics > Materials. Grinding and polishing.

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