Miniaturized systems with micro-optics and micromechanics III : 26-27 January 1998, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Motamedi, M. Edward, Göring, Rolf
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1998]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3276.
Subjects:	Integrated optics > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optical scanners > Congresses.

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