Simulation of diffusion processes in semiconductor manufacturing /

Statistical analysis and Monte Carlo simulation in the SIMAN

Bibliographic Details

Main Author:	Allen, Donald L., 1946-
Format:	Thesis Book
Language:	English
Published:	[Place of publication not identified] : [publisher not identified] ; 1997.
Subjects:	Major engineering.
Online Access:	http://proxy.library.tamu.edu/login?url=http://proquest.umi.com/pqdweb?did=736579581&sid=1&Fmt=2&clientId=2945&RQT=309&VName=PQD