Design of "the Fancier" : an instrument for fabrication and analysis of nanostructures combining ion and electron regulation = Ontwerp van "the Fancier" : een instrument voor fabrikage en analyse van nanostructuren door gecombineerde ionen en elektronen sturing /

Bibliographic Details
Main Author:	Jager, Patrick de, 1969-
Format:	Thesis Book
Language:	English
Language Notes:	Text in English; summary also in Dutch.
Published:	[Delft] : Delft University Press, [1997]
Subjects:	Nanotechnology. Nanostructures. Electrooptical devices > Design and construction. Ion beam lithography. Electron beams.

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