Microelectromechanical systems (MEMS)--1997-- : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas /

Bibliographic Details
Corporate Authors:	International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers. Dynamic Systems and Control Division
Other Authors:	Chang, W. S. (Won S.)
Format:	Conference Proceeding Book
Language:	English
Published:	New York, N.Y. : American Society of Mechanical Engineers, [1997]
Series:	DSC (Series) ; vol. 59. HTD (Series) ; vol. 354.
Subjects:	Microelectronics > Congresses. Electromechanical devices > Congresses.

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