Multilevel interconnect technology : 1-2 October 1997, Austin, Texas /
| Corporate Authors: | Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society |
|---|---|
| Other Authors: | Patel, Divyesh N., Graef, Mart |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[1997]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3214. |
| Subjects: |
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