Multilevel interconnect technology : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors:	Patel, Divyesh N., Graef, Mart
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3214.
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses.

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