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Multilevel interconnect technology : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors: Patel, Divyesh N., Graef, Mart
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3214.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Description
Physical Description:vii, 132 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081942546X