APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, Patel, D. N., & Graef, M. (1997). Multilevel interconnect technology: 1-2 October 1997, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society, Divyesh N. Patel, and Mart Graef. Multilevel Interconnect Technology: 1-2 October 1997, Austin, Texas. Bellingham, Washington: SPIE, 1997.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Multilevel Interconnect Technology: 1-2 October 1997, Austin, Texas. SPIE, 1997.

Warning: These citations may not always be 100% accurate.