VLSI planarization : methods, models, implementation /

Bibliographic Details
Main Author:	Feinberg, V.
Other Authors:	Levin, A., Rabinovich, E.
Format:	Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic, 1997.
Series:	Mathematics and its applications (Kluwer Academic Publishers) ; v. 399.
Subjects:	Integrated circuits > Very large scale integration > Design and construction. Integrated circuits > Very large scale integration > Mathematical models.

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