Cover Image

Microelectronic structures and MEMS for optical processing III : 29-30 September 1997, Austin, Texas /

Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Solid State Technology, Society of Photo-optical Instrumentation Engineers
Other Authors: Motamedi, M. Edward, Herzig, Hans Peter
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226.
Subjects:
Microelectronics > Congresses.
Electromechanical devices > Congresses.
Optoelectronics > Congresses.
Description
Physical Description:v, 214 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081942658X