Microelectronic structures and MEMS for optical processing III : 29-30 September 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Solid State Technology, Society of Photo-optical Instrumentation Engineers
Other Authors:	Motamedi, M. Edward, Herzig, Hans Peter
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226.
Subjects:	Microelectronics > Congresses. Electromechanical devices > Congresses. Optoelectronics > Congresses.

Remote Storage