Microlithographic techniques in IC fabrication : 25-26 June 1997, Singapore /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Singapore Chapter, Institute of Physics, Singapore, Society of Photo-optical Instrumentation Engineers. Japan Chapter, Nanyang Technological University
Other Authors:	Yoon, Soon-Fatt, Yu, Raymond, Mack, Chris A.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3183.
Subjects:	Microlithography > Congresses. Integrated circuits > Very large scale integration > Congresses.

Remote Storage