Micromachined devices and components III : 29 September 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Solid State Technology
Other Authors:	Chau, Kevin, French, Patrick J.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3224.
Subjects:	Electromechanical devices > Congresses. Micromechanics > Congresses. Micromachining > Congresses.

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