Cover Image

Microelectronic manufacturing yield, reliability, and failure analysis III : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors: Ali Keshavarzi, Prasad, Sharad, Hartmann, Hans-Dieter
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1997]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3216.
Subjects:
Microelectronics > Congresses.
Integrated circuits > Very large scale integration > Congresses.
Description
Physical Description:viii, 198 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819426482