Microelectronic manufacturing yield, reliability, and failure analysis III : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors:	Ali Keshavarzi, Prasad, Sharad, Hartmann, Hans-Dieter
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3216.
Subjects:	Microelectronics > Congresses. Integrated circuits > Very large scale integration > Congresses.

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