Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas /
| Corporate Authors: | Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society |
|---|---|
| Other Authors: | Ghanbari, Abe, Toprac, Anthony J. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[1997]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3213. |
| Subjects: |
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