Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology, Electrochemical Society
Other Authors:	Ghanbari, Abe, Toprac, Anthony J.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1997]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3213.
Subjects:	Integrated circuits > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses.

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